This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a position adjusting mechanism (140) for adjusting the position of a nozzle (120) which ejects a fluid. A bonded substrate stack...http://www.google.de/patents/US6825099?utm_source=gb-gplus-sharePatent US6825099 - Method and apparatus for separating member
