Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a reticle handling arm. The one or more reticle stop blocks are designed and arranged to engage an edge of the...http://www.google.de/patents/US6873402?utm_source=gb-gplus-sharePatent US6873402 - Reticle stop block apparatus and method
