A metal layer is patterned by compression moulding using a stamp to create a thickness contrast pattern, followed by etching to transfer the thickness contrast pattern into the entire thickness of the metal layer. The stamp is typically patterned using a technique such as electron beam lithography, and...http://www.google.de/patents/US6165911?utm_source=gb-gplus-sharePatent US6165911 - Method of patterning a metal layer
