A fabrication process for rendering, for example, amorphous silicon (a-Si) films into polycrystalline silicon (poly-Si) films initially commences with the deposition of the a-Si film on a substrate such as glass. The a-Si film is then exposed to a particle flux (e.g. a plasma or a neutral beam). The...http://www.google.de/patents/US5624873?utm_source=gb-gplus-sharePatent US5624873 - Enhanced crystallization of amorphous films
