A vacuum collet (10) for picking up a semiconductor die (11). A plate (12) has a vacuum tube (15) and a downwardly extending skirt (19). Skirt (19) contacts the perimeter of die (11). The vacuum is distributed to the perimeter of the semiconductor die (10) by a baffle (16) interposed between the plate...http://www.google.de/patents/US5516125?utm_source=gb-gplus-sharePatent US5516125 - Baffled collet for vacuum pick-up of a semiconductor die
