A manufacturing process including forming a first insulating region on top of an active area; forming a tunnel region laterally to the first insulating region; forming a floating gate region; sealing the floating gate region with an insulating region; forming a control gate region on top of the floating...http://www.google.de/patents/US6340828?utm_source=gb-gplus-sharePatent US6340828 - Process for manufacturing nonvolatile memory cells with dimensional control of the floating gate regions
