A hollow cathode gun used in ion plating through the HCD process comprises a hollow cathode consisting of an outer graphite layer and an inner Ta, W or LaB.sub.6 layer. The deposition device hollow comprises at least one crucible housing an evaporation material, a substrate and a reaction gas inlet,...http://www.google.de/patents/US4863581?utm_source=gb-gplus-sharePatent US4863581 - Hollow cathode gun and deposition device for ion plating process
