Various embodiments of the invention relate to methods and systems for thermal compensation of a MEMS device. In certain embodiments, an interferometric modulator includes a first electrode and a flexible second electrode situated on a substrate. The flexible second electrode is a movable layer that...http://www.google.de/patents/US7161730?utm_source=gb-gplus-sharePatent US7161730 - System and method for providing thermal compensation for an interferometric modulator display
