The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for supporting the mirror and to deflect the mirror to a range of deflecting angles; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode...http://www.google.de/patents/US8115986?utm_source=gb-gplus-sharePatent US8115986 - Mirror device comprising drive electrode equipped with stopper function
