Dielectric layers containing a zirconium-doped tantalum oxide layer, where the zirconium-doped tantalum oxide layer is arranged as a structure of one or more monolayers of tantalum oxide doped with zirconium, provide an insulating layer in a variety of structures for use in a wide range of electronic...http://www.google.de/patents/US20060264064?utm_source=gb-gplus-sharePatent US20060264064 - Zirconium-doped tantalum oxide films
