An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection...http://www.google.de/patents/US6540466?utm_source=gb-gplus-sharePatent US6540466 - Compact apparatus and method for storing and loading semiconductor wafer carriers
