An optical module and method in which an optical element (32) and an optical waveguide (34) are formed on a silicon substrate (31) so that an optical axis of the optical element coincides with an optical axis of the optical waveguide. Metallized films (41, 42) are formed on the silicon substrate...http://www.google.de/patents/US5793914?utm_source=gb-gplus-sharePatent US5793914 - Optical module & method for manufacturing the same
