Protective layers are formed on a surface of an atomic layer deposition (ALD) or chemical vapor deposition (CVD) reactor. Parts defining a reaction space for an ALD or CVD reactor can be treated, in situ or ex situ, with chemicals that deactivate reactive sites on the reaction space surface(s). A pre-treatment...http://www.google.de/patents/US7914847?utm_source=gb-gplus-sharePatent US7914847 - Reactor surface passivation through chemical deactivation
