A semiconductor force sensor capable of preventing a diaphragm part (37) from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part (37), wherein a force transmitting means for applying a measured force to the diaphragm part (37) of a semiconductor...http://www.google.de/patents/US7234359?utm_source=gb-gplus-sharePatent US7234359 - Semiconductor force sensor
