A cleaving tool provides pressurized gas to the edge of a substrate in combination with a sharpened edge to cleave the substrate at a selected interface. The edge of the tool is tapped against the perimeter of a substrate, such as a bonded substrate, and a burst of gas pressure is then applied at approximately...http://www.google.de/patents/US6513564?utm_source=gb-gplus-sharePatent US6513564 - Nozzle for cleaving substrates
