A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated...http://www.google.de/patents/US6386507?utm_source=gb-gplus-sharePatent US6386507 - Microelectromechanical valves including single crystalline material components
