A probing apparatus can include a plurality of contact probes, which can be of a type that is disposed along an axis. Each contact probe can include a contact portion, a base portion, and resilient portion. Multiple arms can form the resilient portion, which can be disposed between the contact portion...http://www.google.de/patents/US7731546?utm_source=gb-gplus-sharePatent US7731546 - Microelectronic contact structure