A precursor liquid comprising barium and strontium 2-ethylhexanoates and titanium 2-methoxyethanol in a 2-methoxyethanol solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining...http://www.google.de/patents/US5614252?utm_source=gb-gplus-sharePatent US5614252 - Method of fabricating barium strontium titanate
