[54] INVERTED SPACER TRANSISTOR
[75] Inventors: Robert S. Chau, Beaverton;
Chan-Hong Chern, Portland;
Shahriar S. Ahmed, Beaverton;
Robert F. Hainsey, Portland; Robert
J. Stoner, Aloha; Todd E. Wilke;
Leopoldo D. Yau, both of Portland,
all of Oreg.
[73] Assignee: Intel Corporation, Santa Clara, Calif.
[21] Appl. No.: 288,332
[22] Filed: Aug. 10,1994
[51] Int. Cl.« H01L 21/265
[52] U.S. CI. 437/41; 437/40;
437/44; 437/45; 437/984
[58] Field of Search 437/40, 41, 44, 45,
437/984
[56] References Cited
U.S. PATENT DOCUMENTS
4,378,627 4/1983 Jambotkar 437/41
4,895,520 1/1990 Berg 437/45
5,034,351 7/1991 Sun et al 437/41
5,047,361 9/1991 Matloubian et al 437/40
5,082,794 1/1992 Pfiester et al 437/41
5,091,763 2/1992 Sanchez 437/41
5,175,119 12/1992 Matsutani 437/41
5,217,910 6/1993 Shimizu et al 437/44
5,223,445 6/1993 Fuse 437/44
