[54] LIQUID AND METHOD TO CLEAN METAL MASKS FOR SURFACE MOUNTING TECHNOLOGY
[75] Inventors: Choul-Su Kim; Woo-Sig Kim;
Masaharu Tsukue, all of Suwon, Rep. of Korea
[73] Assignee: SamSung Electronics Co., Ltd.,
Suwon, Rep. of Korea
[21] Appl. No.: 08/864,119
[22] Filed: May 28, 1997
[30] Foreign Application Priority Data
Jul. 19, 1996 [KR] Rep. of Korea 96 29277
[51] Int. CI.6 CUD 3/43; C23G 5/02
[52] U.S. CI 510/175; 510/176; 510/407;
510/412; 510/413; 134/1.3; 134/26
[58] Field of Search 510/175, 176,
510/407, 412, 413, 414; 134/1.3, 34.2, 26, 38, 40, 42
[56] References Cited
U.S. PATENT DOCUMENTS
3,723,332 3/1973 Barton 252/171
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4,606,842 8/1986 Keyes et al 252/174.23
4,847,004 7/1989 McLeod 252/527
4,971,083 11/1990 Stach et al 134/57 R
5,011,713 4/1991 Lentietal 427/393.6
5,023,010 6/1991 Merchant 252/171
5,043,088 8/1991 Falla 252/70
5,238,504 8/1993 Henry 134/40
5,250,213 10/1993 Rozen et al 252/162
5,271,775 12/1993 Asano et al 134/40
5,271,861 12/1993 Buchwald et al 252/153
5,302,313 4/1994 Asano et al 252/171
5,456,760 10/1995 Goehausen 134/42
5,593,504 1/1997 Cala et al 134/1
OTHER PUBLICATIONS
McCutcheon's, vol. 1: Emulsifiers & Detergents, North American Edition, p. 83, #-97.
Sharovarnikov, A.F., et al., "Surface activity of fluorinecontaining surfactants in polar solvents and water-organic mixtures", Kolloidn. Zh., 53(5), 949-954, #-91. Shah, Khalid M., et al., "Change your surfactant formula and use etch baths for a week", Semicond. Int., 11(11), 132-134, #-88.
# Month not available.
Primary Examiner—Mark Kopec
Assistant Examiner—Gregory E. Webb
Attorney, Agent, or Firm—Robert E. Bushnell, Esq.