(54) SYSTEM AND METHOD FOR
MID-PRESSURE DENSE PHASE GAS AND
ULTRASONIC CLEANING
(75) Inventors: Michael A. Fury, San Francisco, CA (US); Robert Wade Sherrill, San
Rafael, CA (US)
(73) Assignee: EKC Technology, Inc., Hayward, CA (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
(21) Appl. No.: 11/173,603
(22) Filed: Jul. 1, 2005
(65) Prior Publication Data
US 2007/0000521 Al Jan. 4, 2007
(51) Int. CI.
C23G1/00 (2006.01)
(52) U.S. CI 134/2; 134/1; 134/26; 134/29;
134/34; 134/36; 134/42; 134/902
(58) Field of Classification Search 134/2,
134/1,26, 29, 34, 36, 42, 902 See application file for complete search history.
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* cited by examiner
Primary Examiner—Sharidan Carrillo
(74) Attorney, Agent, or Firm—Morgan Lewis & Bockius
LLP
