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US006635916B2
(12) United States Patent ao) Patent No.: us 6,635,916 B2
Aton (45) Date of Patent: Oct. 21,2003
(54) ON-CHIP CAPACITOR
(75) Inventor: Thomas J. Aton, Dallas, TX (US)
(73) Assignee: Texas Instruments Incorporated,
Dallas, TX (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
(21) Appl. No.: 09/935,519
(22) Filed: Aug. 23, 2001
(65) Prior Publication Data
US 2002/0024087 Al Feb. 28, 2002
Related U.S. Application Data
(60) Provisional application No. 60/229,488, filed on Aug. 31, 2000.
(51) Int. CI.7 H01L 27/108; H01L 29/76;
H01L 29/94; H01L 31/119
(52) U.S. CI 257/306; 257/307
(58) Field of Search 257/296, 303,
257/306, 307, 310
(56) References Cited
U.S. PATENT DOCUMENTS
5,208,725 A 5/1993 Akcasu
