Ill III II11IIII11 III III Mil 11IIIIIIII
US 20020132396A1
(19) United States
(12) Patent Application Publication (io) Pub. No.: US 2002/0132396 Al
Yamazaki et al. (43) Pub. Date: Sep. 19,2002
(54) SEMICONDUCTOR DEVICE AND (30) Foreign Application Priority Data
MANUFACTURING METHOD THEREOF
Mar. 8, 2000 (JP) 2000-064227
