Active matrix display and forming method thereof

(54) ACTIVE MATRIX DISPLAY AND FORMING METHOD THEREOF

(75) Inventors: Shunpei Yamazaki, Tokyo; Jun

Koyama, Kanagawa; Yuji Kawasaki,
Kanagawa; Toshimitsu Konuma,
Kanagawa; Satoshi Teramoto,
Kanagawa; Yoshiharu Hirakata,
Kanagawa, all of (JP)

(73) Assignee: Semiconductor Energy Laboratory
Co., Ltd., Kanagawa-Ken (JP)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.

5,076,667 A * 12/1991 Stewart et al 349/139

5,148,301 A * 9/1992 Sawatsubashi et al 349/153

5,517,344 A * 5/1996 Hu et al 349/149

5,563,427 A * 10/1996 Yudasaka et al 257/72

5,608,232 A 3/1997 Yamazaki et al 257/66

5,639,698 A 6/1997 Yamazaki et al 437/228

FOREIGN PATENT DOCUMENTS

JP 64-49022 * 2/1989

JP 62-251723 * 2/1989

JP 406244103 A * 9/1994

JP 406244104 A * 9/1994 257/72

* cited by examiner

(21) Appl. No.: 09/287,551

(22) Filed: Apr. 5, 1999

Related U.S. Application Data

(63) Continuation ol application No. 08/601,956, filed on Feb. 15, 1996, now Pat. No. 6,011,607.

(30) Foreign Application Priority Data

Mar. 20, 1995 (JP) 7-87369

Dec. 20, 1995 (JP) 7-349669

Feb. 15, 1997 (JP) 7-50527

(51) Int. CI.7 H01L 29/786

(52) U.S. CI 257/72; 349/151

(58) Field of Search 257/72; 349/151

(56) References Cited

U.S. PATENT DOCUMENTS

4,394,067 A * 7/1983 Spraijt et al 349/151

Primary Examiner—Eddie Lee

Assistant Examiner—Bradley Baumeister

(74) Attorney, Agent, or Firm—Fish & Richardson PC.

(57) ABSTRACT

An active matrix liquid crystal display having improved reliability. Pixel regions and a peripheral driver circuit are integrally packed on the display. TFTs forming the peripheral driver circuit are located inside a sealing material layer on the side of a liquid crystal material, thus protecting the peripheral driver circuit from external moisture and contaminants. This enhances the long-term reliability of the peripheral driver circuit. Pixel TFTs are arranged in pixel regions. The leads going from the TFTs forming the peripheral driver circuit to the pixel TFTs are shortened. This results in a reduction in the resistance. As a result, the display characteristics are improved.

43 Claims, 15 Drawing Sheets