5,661,591 8/1997 Lin et al 359/290
5,734,492 3/1998 Chung 359/291
5,735,026 4/1998 Min 359/291
5.739.946 4/1998 Iwanaga et al 359/290
5,754,330 5/1998 Nam 359/291
5.760.947 6/1998 Kim et al 359/291
5,790,297 8/1998 Berlin 359/291
5,815,305 9/1998 Min et al 359/292
5,943,157 8/1999 Florence et al 359/290
Primary Examiner—Georgia Epps
Assistant Examiner—Evelyn A. Lester
Attorney, Agent, or Firm—Charles A. Brill; Frederick J.
Telecky, Jr.; Richard L. Donaldson
[57] ABSTRACT
Amicromirror array fabricated on a semiconductor substrate 708. The micromirrors in the micromirror array logically divided into an interior active region 704 which selectively modulates light striking the mirrors in the interior active region 704, and an exterior border region 702 for producing a dark border around the image produced by the interior active region 704. A gap between each mirror allows adjacent mirrors to rotate. The gap 712 between mirrors in the interior active region 704 of the array is larger than the gap 710 between at least some of the mirrors in the exterior border region 702. The smaller gap 710 in the exterior region 702 is enabled by restricting mirrors in the exterior region 702 to a single direction of rotation.
15 Claims, 5 Drawing Sheets