(54) METHOD OF FORMING A REFLECTIVE ELECTRODE AND A LIQUID CRYSTAL DISPLAY DEVICE
(75) Inventor: Naoki Sumi, Kobe (JP)
(73) Assignee: TPO Displays Corp., Miao Li County (TW)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 53 days.
(21) Appl. No.: 10/928,867
(22) Filed: Aug. 27, 2004
(65) Prior Publication Data
US 2005/0029517 Al Feb. 10, 2005
Related U.S. Application Data
(62) Division of application No. 10/188,762, filed on Jul. 3, 2002, now Pat. No. 6,815,347.
(56) References Cited
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(Continued)
OTHER PUBLICATIONS
Yamaguichi et al: "20.2: A Simple Reflective TFT-LCD Fabrication Using Four Photomask Processes" 1998 SID International Symposium Digest Of Technical Papers, vol. 29, May 17, 1998, pp. 297-300.
Primary Examiner—Ida M. Soward
(74) Attorney, Agent, or Firm—Birch, Stewart, Kolasch & Birch, LLP.
The present invention provides a method of forming a TFT and a reflective electrode having recesses or projections with reduced manufacturing cost and a reduced number of manufacturing steps, and provides a liquid crystal display device to which the method is applied. A photosensitive film 8 is formed on a metal film 7. Then, remaining portions 81, 82 and 83 are formed from the photosensitive film 8. Then, the metal film 7 is etched by using the remaining portions 81, 82 and 83 as masks. And then, a photosensitive film 9 and a reflective electrode film 10 are formed without removing the remaining portions 81, 82 and 83.
12 Claims, 9 Drawing Sheets
