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(12) United States Patent ao) Patent No.: Us 7,473,928 Bi

Yamazaki et al. (45) Date of Patent: Jan. 6,2009

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To provide a high throughput film deposition means for film depositing an organic EL material made of polymer accurately and without any positional shift. A pixel portion is divided into a plurality of pixel rows by a bank, and a head portion of a thin film deposition apparatus is scanned along a pixel row to thereby simultaneously apply a red light emitting layer application liquid, a green light emitting layer application liquid, and a blue light emitting layer application liquid in stripe shapes. Heat treatment is then performed to thereby form light emitting layers luminescing each of the colors red, green, and blue.

6 Claims, 23 Drawing Sheets

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* cited by examiner

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