A semiconductor device for use in a memory cell includes an active matrix provided with a semiconductor substrate, a plurality of transistors formed on the semiconductor substrate and conductive plugs electrically connected to the transistors, a number of bottom electrodes formed on top of the conductive...http://www.google.de/patents/US20020020869?utm_source=gb-gplus-sharePatent US20020020869 - Semiconductor device incorporated therein high K capacitor dielectric and method for the manufacture thereof
Semiconductor device incorporated therein high K capacitor dielectric and ...
