A method for forming a film of material (12) from a donor substrate (10). The technique has a step of introducing energetic particles (22) through a surface of a donor substrate (10) to a selected depth (20) underneath the surface, where the particles have a relatively high concentration to define a...http://www.google.de/patents/US6162705?utm_source=gb-gplus-sharePatent US6162705 - Controlled cleavage process and resulting device using beta annealing
Controlled cleavage process and resulting device using beta annealing
