A method for fabricating a semiconductor device according to the present invention is a method for fabricating a semiconductor device including a substrate layer including a plurality of first regions each having an active region and a plurality of second regions each being provided between adjacent...http://www.google.de/patents/US7425475?utm_source=gb-gplus-sharePatent US7425475 - Method for fabricating semiconductor device and semiconductor device
Method for fabricating semiconductor device and semiconductor device