Method for making a self-converged void and bottom electrode for memory cell

40

^ x x x s Xt

|X X X X X X X

x x x x x x x

|x X X X X X X

x x x x x x x x x x x x x x

x x x x x x x x x x x x x x

x x x x x x x

X X X X X X X
X X X X X X X

xxx TMxTMxmir' 5T Jny"'x xxx'xxxxxx xxxxxxxxxxxxxxxxxxx

xxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx

X X X X X X x X X X X X X X X X X X

—lx x x x ^j-— I"

X X X X _

x x x x x£.

X X X X

x x x x x
X X X X X xl
X X X X X

x x y^v x x|

X
X X

X
X X

X X\ /XX
X X Vyfc X H

X X X X X
X X X X X

X X X X X
X X X X x >i
X X X X X

xi x x x xx"x1«'

X X X X X X X

x x x x x x x

X X X X X X

x x x x x x x
x x x x x x

XXX
X X X X X x
X X X X X X X
X X X X X X X

x x x x x

X X
X X X X x xj

X X X X X
|X X X X X x|
X X X X X

x x x x x x|

X X X X
X X X X X Xj

X X X X X
X X X X X Xj
X X X X X

x x x x x Xj

•38

22

■24
42

00 CO

CM ^

X j< X|

X X
|X X x|

X X
X X X|

X X
|X X X

X X
|X X X
X X

IX X X

T X X K,X» XXX

|x x x trVSJX x *

x x y. X XXX [XXXXXXXX

Txxxxxxx

X X X X X X x^-—i—■<* X
X X X X X Xf >X X

X

XXX

XXXXXXXXXXXX
X X X X X X X X X XXX

tx x xj^X'^x x x x x;

X X X X X
X X X X X

x x x x x x
x x x x x xi

X X X X X X

x x x x x

X X X X X X

x x x x x xi

X X X X X X
XXX XXX

x x x x x

X X X X X X

X X X X X x X X X X

x lx |x x x
x >J xf x x
|X x 'x U x X
X X Xl X X x|

fx x x k x x

x x x \ x x
|x x x A x x

X X x \x X X|
|X X X x\ X X
X X X K X X|
X X X \ X X

x x x >t x x|
pa x x x \x x

X

y—

X

X X X X
X X X X

; X X X X Xf }X X

x x x x x V. X x x

; X x XXX )TTl( X X

* x xi x x xi

X X X IX X X

x x xr x x x]

X X X X X X

xxx x x xl

|X X X X X X
XXX X X Xl

X X X X X
X X X X X X]

X X X X X
X X X X X

XXX X X x|

x x x x x x

XXX X x x|
X X X X X X

X X X X X >J
X X X X X X

X X X X X x|
X X X X X X

x x x x x x|

IX_X__X X X X