Modeling conductive patterns using an effective model

. - . e . - - ~ . . . > | . ~ - - . . I . . . . . 0 1 Q3.“ . . . . - . . . . . . . . . . . . . . . . . . . . I . . . . . . . . . . . . . . D~2~ - 0 0 - e . I ~ ‘ I ~ - - 0 - 0 4 - 0 ~ ~ - . . E - S . . - . 0 - - - 0 - 0 . 0 - I I S ' ¢ ¢ ' ~ - ' ' 0 0 11.1 _ 0.0- I 300 400 500 500 700 800 Wewlanqth (nml

Fig. 5C

I

Generate an effective medium layer that combines the J184 optical properties of the materials in the periodic pattern

I

186 Generate a uniform layer that underlies the effective / medium layer and that has the optical properties of the

1931/3‘; = I194

Z =\
233355

‘\_/ Fig. 7

the model
v Adjust parameters

of model 3081 Compare modeled \—312 data with aquired data

310 Match?

Store result (Model is [-314
accurate)

Fig. 9