Using thin film transistors (TFTs), an active matrix circuit, a driver circuit for driving the active matrix circuit or the like are formed on one substrate. Circuits such as a central processing unit (CPU) and a memory, necessary to drive an electric device, are formed using single crystalline semiconductor...http://www.google.de/patents/US6198133?utm_source=gb-gplus-sharePatent US6198133 - Electro-optical device having silicon nitride interlayer insulating film
Electro-optical device having silicon nitride interlayer insulating film