Chen et al.
Lin et al.
Reboa
Park
Patel et al.
Kaneko
Hsu et al.
Lin
Lin et al.
Lin
Van Brocklin et al.
Martin et al.
Piehl et al.
Piehl et al.
Martin et al.
Martin et al.
Van Brocklin et al.
Lin et al.
Miles
Martin et al.
Nikkei et al.
Miles et al.
Martin et al.
Lin et al.
Pillansetal 335/78
George et al.
Pyo 438/184
Shi et al.
Lin
Tsai
Yeh et al.
Lin et al.
Adelmann
Lin
Taguchi et al.
Lin et al.
Lin
Way
Gutkowski et al.
Tsai
Tsai
Damera-Venkata et al.
Lin
Fuertsch et al.
Ljungblad
Lin
Lin
Kothari et al.
Hung et al.
Tung et al.
Miles et al 438/48
Lin
Przybyla et al.
Nikkei et al.
Chui et al 438/222
Chui
Chui et al.
Cummings et al.
Chui et al.
Faase et al.
Faase et al.
Sasagawa et al.
Wang
Yama
Wang et al.
Chung et al.
Miles
Shimokawa et al.
Chung et al.
Bachman et al.
WO WO 2006/073111 7/2006
OTHER PUBLICATIONS
Austrian Search Report dated May 4, 2005.
Austrian Search Report dated Aug. 12, 2005.
Aratani et al., "Surface micromachined tuneable interferometer
array," Sensors and Actuators, pp. 17-23. (1994).
Conner, "Hybrid Color Display Using Optical Interference Filter
Array," SID Digest, pp. 577-580 (1993).
EP 05255661.0 European Search Report (Dec. 30, 2005).
Fan et al., "Channel Drop Filters in Photonic Crystals," Optics
Express, vol. 3, No. 1 (1998).
Giles et al., "A Silicon MEMS Optical Switch Attenuator and Its Use in Lightwave Subsystems," IEEE Journal of Selected Topics in Quanum Electronics, vol. 5, No. 1, pp. 18-25, (Jan./Feb. 1999). Goossen et al., "Possible Display Applications of the Silicon Mechanical Anti-Reflection Switch," Society for information Display (1994).
Goossen et al., "Silicon Modulator Based on Mechanically-Active Anti-Reflection Layer with IMbit/sec Capability for Fiber-in-theLoop Applications," IEEE Photonics Technology Letters, pp. 1119, 1121 (Sep. 1994).
Goossen K.W., "MEMS-Based Variable Optical Interference Devices", Optical MEMS, 2000 IEEE/Leos International Conference on Aug. 21-24,2000, Piscataway, NJ, USA, IEE, Aug. 21,2000, pp. 17-18.
Gosch, "West Germany Grabs the Lead in X-Ray Lithography," Electronics pp. 78-80 (Feb. 5, 1987).
Harnett et al., "Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B 19(6), (Nov./Dec. 2001), pp. 2842-2845. Howard et al., "Nanometer-Scale Fabrication Techniques," VLSI Electronics: Microstructure Science, vol. 5, pp. 145-153 and pp. 166-173 (1982).
Ibbotson et al., "Comparison of XeF2 and F-atom reactions with Si and Si02," Applied Physics Letters, vol. 44, No. 12, pp. 1129-1131 (Jun. 1984).
Jackson "Classical Electrodynamics," John Wiley & Sons Inc., pp. 568-573. (date unknown).
Jerman et al., "A Miniature Fabry-Perot Interferometer with a Cor-
rugated Silicon Diaphragm Support," (1988).
Joannopoulos et al., "Photonic Crystals: Molding the Flow of Light,"
Princeton University Press (1995).
Johnson, "Optical Scanners," Microwave Scanning Antennas, vol. 1, p. 251-261, (1964).
Kim et al., "Control of Optical Transmission Through Metals Perforated With Subwavelength Hole Arrays," Optic Letters, vol. 24, No. 4, pp. 256-257, (Feb. 1999).
Lee et al., "Electrostatic Actuation of Surface/Bulk Micromachined Single-Crystal Silicon Microresonators", International Conference on Intelligent Robots and Systems, vol. 2, pp. 1057-1062, (Oct. 17-21, 1999).
Lee et al., "The Surface/Bulk Micromachining (SBM) Process: A
New Method for Fabricating Released MEMS in Single Crystal
Silicon", Journal of Microclectromechanical Systems, vol. 8, Issue 4,
pp. 409-416, (Dec. 1999).
Light over Matter, Circle No. 36 (Jun. 1993).
Lin et al., "Free-Space Micromachined Optical Switches for Optical
Networking," IEEE Journal of Selected Topics in Quantum Electron-
ics, vol. 5, No. 1, pp. 4-9. (Jan./Feb. 1999).
Little et al., "Vertically Coupled Microring Resonator Channel Dropping Filter," IEEE Photonics Technology Letters, vol. 11, No. 2, (1999).
Magel, "Integrated Optic Devices Using Micromachined Metal
Membranes," SPIE vol. 2686, 0-8194-2060-Mar. (1996).
Miles, Mark, W., "A New Reflective FPD Technology Using
Interferometric Modulation," The Proceedings of the Society for
Information Display (May 11-16, 1997).
Nagami et al., "Plastic Cell Architecture: Towards Reconfigurable
Computing for General-Purpose," IEEE, 0-8186-8900-, pp. 68-77,
(May 1998).
Newsbreaks, "Quantum-trench devices might operate at terahertz
frequencies," Laser Focus World (May 1993).
Oliner et al., "Radiating Elements and Mutual Coupling," Microwave
Scanning Antennas, vol. 2, pp. 131-141, (1966).
PCT/US02/13442, Search Report Sep. 13, 2002.
PCT/US04/20330 Search Report Nov. 8, 2004.
PCT/US05/029821 International Search Report (Dec. 27, 2005).
PCT/US05/030927 International Search Report (0125/2006).
PCT/US05/031693 International Search Report.
PCT/US05/032331 International Search Report (Apr. 7, 2006).
PCT/US05/033558 Partial International Search Report (Feb. 24,
2006).
PCT/US2004/035820 International Search Report and Written Opin-
ion (Nov. 4, 2005).
PCT/US96/17731 Search Report.
Raley et al., "A Fabry-Perot Microinterferometer for Visible Wavelengths," IEEE Solid-State Sensor and Actuator Workshop, Jun. 1992, Hilton Head, SC.
Schnakenberg et al., "TMAHW Etchants for Silicon Micromachining," 1991 international Conference on Solid State Sensors and Actuators-Digest of Technical Papers, pp. 815-818 (1991). Sperger et al., "High Performance Patterned All-Dielectric Interference Colour Filter for Display Applications," SID Digest, pp. 81-83,
(1994) .
Sridharanet al. "Post-Packaging Release a New Concept for SurfaceMicromachined Devices" Technical Digest, IEEE Solid-State Sensor & Actuator Workshop, New York, NY, US, Nov. 8,1998, pp. 225-228, XP000992464.
Stone, "Radiation and Optics, An Introduction to the Classical Theory," McGraw-Hill, pp. 340-343, (1963).
Walker et al., "Electron-beam-tunable Interference Filter Spatial Light Modulator," Optics Letters vol. 13, No. 5, pp. 345-347, (May 1988).
Williams et al., "Etch Rates for Micromachining Processing," Journal of Microelectromechanical Systems, vol. 5, No. 4, pp. 256-259 (Dec. 1996).
Winters et al., "The etching of silicon with XeF2 vapor. Applied
Physics Letters," vol. 34. No. 1, pp. 70-73 (Jan. 1979).
Winton, "A novel way to capture solar energy," Chemical Week,
(May 1985).
Wu, "Design of a Reflective Color LCD Using Optical Interference
Reflectors," ASIA Display '95, pp. 929-931, (Oct. 1995).
Zhou et al., "Waveguide Panel Display Using Electromechanical
Spatial Modulators" SID Digest, vol. XXIX, (1998).
Aratani et al., "Process and Design Considerations for Surface
Micromachined Beams for a Tuneable Interferometer Array in Sili-
con," Proc. IEEE Microelectromechanical Workshop, Fort Lauder-
dale, FL, pp. 230-235 (Feb. 1993).
Austrian Search Report for EX72/2005 dated May 13, 2005.
Austrian Search Report for EX81/2005 dated May 18, 2005.
Austrian Search Report for EX170/2005 dated Jul. 6, 2005.
Austrian Search Report for EX139/2005 dated Jul. 27, 2005.
Austrian Search Report for EX144/2005 dated Aug. 11, 2005.
Bains, "Digital Paper Display Technology Holds Promise for Por-
tables," CommsDesign EE Times (2000).
Bass, Handbook of Optics, vol. 1, Fundamentals, Techniques, and Design, Second Edition, McGraw-Hill, inc. New York pp. 2.29/2.36
(1995) .
Chu, et al. "Formation and Micro structures of Anodic Aluminoa Films from Aluminum Sputtered onglass Substrate" Journal of the Electrochemical Society, 149 (7) B321-8327 (2002). Crouse, "Self-ordered pore structure of anodized aluminum on silicon and pattern transfer" Applied Physics Letters, vol. 76, No. 1, Jan. 3, 2000. pp. 49-51.
French, P.J. "Development of Surface Micromachining techniques compatable with on-chip electronics" Journal of Micromechanics and Microenglneering vol. 6 No. 2, 197-211 XP 002360789 Jun. 1996 IOP Publishing.
Furneaux, et al. "The Formation of Controlled-porosity membranes fromAnodically Oxidized Aluminium" Nature vo 337 Jan. 12,1989, pp. 147-149.
Jerman J. H. et al., "Maniature Fabry-Perot Interferometers Micromachined in Silicon for Use in Optical Fiber WDM Systems,"
Transducers. San Francisco, Jun. 24-27, 1991, Proceedings of the Intematioal Conference on Solid State Sensors Andactuators, New Youk IEEE, US, vol. Conf. 6, Jun. 24, 1991.
Lieberman, "MEMS Display Looks to Give PDAs Sharper Image," EE Times (Feb. 11, 1997).
Lieberman, "Microbridges at Heart of New MEMS Displays," EE Times (Apr. 24, 1997).
Maboudian, et al. Critical Review: Adhesion in Surface Micromechanical Structures: J. Vac. Sci Techno. B 15(1) Jan./Feb. 1997, pp. 1-20.
Microchem, LOR Lift-Off Resists Datasheet, 2002. Miles, "Interferometric Modulation: MOEMS as an Enabling Technology for High-Performance Reflective Displays," Proceedings of the International Society for Optical Engineering, San Jose, CA, vol. 49085, pp. 131-139 (Jan. 28, 2003).
Miles, et al., "10.1: Digital Paper for Reflective Displays," 2002 SID
International Symposium Digest of Technical Papers, Boston, MA,
SID International Symposium Digest of Technical Papers, San Jose,
CA, vol. 33 / 1, pp. 115-117 (May 21-23, 2002).
Penta Vacuum MEMS Etcher Specifications, http:www.
pentavacuum.com/memes.htm.
Science and Technology, The Economist, pp. 89-90, (May 1999).
Search Report PCT/US05/030033 and Written Opinion.
Search Report PCT/US05/030902.
Search Report and Written Opinion for PCT/US05/33558 (May 19, 2005).
Search Report PCT/US05/032331 (Apr. 7, 2006). Search Report PCT/US05/032331 (Jan. 9, 2006). Search Report and written opinion PCT/US05/032647. Tayebi et al. "Reducing the Effects of adhesion and friction in microelectomechanical systesm (MEMS) through surface roughening: Comparision Between theory and experiments" http://jap.ajp. org/jap/copyright.isp Journal of applied Physics 98, 073528 (2005).
Thin Film Transistors—Materials and Processes—vol. 1 Amorphous Silicon Thin Film Transistors ed. Yue Kuo, Kluwer Academic Publishers, Boston (2004).
Xactix Xetch X Specifications, http://xactix.com/Xtech X3specs.
htm. Jan. 5, 2005.
Xactix Xetch Product information.
International Search Report dated Oct. 1, 2007 for International Application No. PCT/US2007/009267 based on the present application.
ISRandWO for PCT/US07/009267 filed Apr. 12, 2007.
Kogut et al., "A finite element based elastic-plastic model for the
contact of rough surfaces", Tribology Transactions, Dept. of
Mechanical Engineering, Haifa, 32000, Israel, vol. 46 (2003), 3, pp.
383-390.
Matsumoto et al., "Novel prevention method of stiction using silicon anodization for SOI structure", Sensors and Actuators, vol. A72 (1999), pp. 153-159.
Chiou et al., "A Novel Capacitance Control Design of Tunable Capacitor Using Multiple Electrostatic Driving Electrodes," IEEE Nano 2001, M 3.1, Nanoelectronics and Giga-Scale Systems (Special Session), Oct. 29, 2001, pp. 319-324.
Fork, et al., "P-67: Chip on Glass Bonding using StressedMetalTM Technology" Sid 05 Digest, May 24, 2005.
U.S. Office Action issued Feb. 3,2009 in U.S. Appl. No. 11/406,866. Niklasson, "Modeling the Optical Properties of Nanoparticles," SPIE Newsroom, Apr. 20, 2006, pp. 1-4.
Rahman et al., "Size-Dependent Physicochemical and Optical Properties of Silica Nanoparticles," Mater. Chem. and Phys., Mar. 15, 2009, vol. 114, l,pp. 1-2.
Worldwide Web, e ce.gatech.edu/research/labs/vc/theory/photolifh. html, "Photolithography," Jul. 2009, pp. 1-4.
World Wide Web, en.wikipedia.org/wiki/Nanoparticle, "Nanoparticle," Jun. 2009, pp. 1-10.
* cited by examiner
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