WO1981002629A1 - Electronically controlled flow meter and flow control system - Google Patents

Abstract

A novel, low-friction, low-inertia flexible diaphragm (4) containing a magnet (5) formed as an integral part of the diaphragm is mounted in a chamber (12a, 12b) (preferably cylindrical). The chamber comprises part of the flow meter in a flow control system. One or more sensing devices (6a, 6b) are mounted on the walls of the chamber to sense the instantaneous position of the diaphragm. A novel electronic control circuit processes the data from the one or more sensing devices to provide measures of the flow rate during the displacement of the diaphragm along the cylinder. Signals are generated by the electronic control circuitry for switching a pair of three-way valves (one valve comprising the input valve (1) and the other valve comprising the output valve (2) such that during one-half of a cycle the input valve transfers fluid into the cylinder on one side of the diaphragm and, during the other half of the cycle, transfers fluid into the cylinder on the other side of the diaphragm. The output valve is switched synchronously with the input valve to transmit fluid from the other side or one side of the diaphragm to the output valve. The electronic control system includes means for amplifying the output signals from the one or more sensing devices ("sensors") to provide one or more signals representing the position of the diaphragm as a function of time, means for converting the output signals from these amplifiers to digital form, and computation means for operating on the digitized output signals from the sensing devices to provide control signals for controlling a second input valve thereby to control the flow rate of the fluid being metered to within a desired range.

Description

Entitled: Electronically Controlled Flow Meter and Flow Control System

Field of the Invention This invention relates to an electronic flow control system using an electronically-controlled positive displacement flow meter. Prior Art Positive displacement flow meters are well known. Thus British Patent 1,051,710 published December 21, 1966, discloses a positive displacement flow meter utilizing a cylinder wherein a reciprocating piston is controlled to move from one end to the other of the cylinder in response to the alternate passage of the fluid whose flow is being measured into the cylinder at one or the other end of the piston- As fluid under pressure enters one end of the cylinder via an inlet pipe, the piston is pushed along the cylinder and the fluid which entered the cylinder at the other end of the piston as a result of the previous stroke is forced into the outlet pipe. Valves in a well known arrangement allow fluid to alternately enter one end of the cylinder and be withdrawn from the other end of the cylinder and vice versa. Other positive displacement flow meters are shown in U.S. Patent No. 2,772,664 issued December 4, 1956 to Jones, et. al., U.S. Patent No. 3,181,360 issued May 4, 1965 to Hederhorst, and U.S. Patent No. 3,657,925 issued April 25, 1972 to Gross. The *710, '664, '925 and '360 patents all disclose reciprocating pistons as the positive displacement member. However, the '360 patent discloses in addition, the use of a flexible diaphragm 18 to seal a rigid piston 16 (Figure 1 of the '360 patent), which travels between two chambers in a cylinder, to the cylinder wall. As one chamber is filled with gas or fluid, a like amount of gas or fluid is expelled from the other chamber. Reversal of the chambers in which 'gas is inserted and from which the gas is removed causes the d aphragm to rec pro- cate back and forth across the chamber. The number of strokes of the piston-diaphragm combination (with the diaphragm made of Teflon or rubber), is representative of the volume of gas passing through the meter. U.S. Patent 3,974,825 issued August 17, 1976 discloses a pump using a flexible, pneumatically-driven diaphragm for pumping blood in an artificial heart. Each of the above structures has certain disadvantages A piston introduces inertia and friction into the flow system thereby affecting the flow to be measured. Moreover the fluid whose flow is being measured often leaks past the piston. In addition, the frequency response of the system is limited by the inertia of the piston. For accurate flow control, a low inertia, low friction, accurate flow meter is required as an essential part of the control system. Summary of the Invention This invention overcomes certain of the disadvantages of the prior art positive .displacement flow meters. In accordance with this invention, a novel, low-friction, low-inertia flexible diaphragm containing a magnet formed as an integral part of the diaphragm is mounted in a chamber (preferrably cylindrical). The chamber comprises part of the flow meter in a flow control system. One or more sensing devices are mounted on the walls of the chamber to sense the instantaneous position of the diaphragm. A novel electronic control circuit processes the data from the one or more sensing devices to provide measures of the flow rate during the displacement of the diaphragm along the cylinder. Signals are generated by the electronic control circuitry for switching a pair of three-way valves (one valve comprising the input valve and the other valve comprising the output valve) such that during one-half of a cycle the input valve transfers fluid into the cylinder on one side of the diaphragm and, during the other half of the cycle, transfers fluid into the

t— cylinder on the other side of the diaphragm. The output valve is switched synchronously with the input valve to transmit fluid from the other side or one side of. the diaphragm to the output valve. The electronic control system includes means for amplifying the output signals from the one or more sensing devices ("sensors") to provide one or more signals repre- senting the position of the diaphragm as a function of time, means for converting the output signals from these amplifiers to digital form, and computation means for operating on the digitized output signals from the sensing devices to provide control signals for controlling a second input valve thereby to control the flow rate of the fluid being metered to within a desired range. As a feature of the invention, an output flow rate is not determined unless and until the diaphragm has traveled a selected distance or until a maximum time has elapsed, thereby to ensure that a minimum volume of fluid has entered the positive displacement flow meter portion of the control system and displaced the diaphragm at least a selected amount. By dividing this displacement by the time over which it occurs, the volumetric flow rate is obtained. Description of the Drawings Figure 1 illustrates schematically the chamber in -which is located the positive displacement diaphragm used for measuring flow rate. Figures 2a and 2b show diaphragms connected to the chamber by bellows and an O-ring type seal, respectively. Figure 3 shows schematically the connection of the sensing element on the end of the chamber containing the diaphragm through an electronic controller to an electroni- cally controlled valve for maintaining the proper fluid flow. Figure 4 shows schematically the relationship of the diaphragm, flow chamber, sensing elements, the microcom- puter used to compute the control signals used to control the fluid flow rate, the fluid control valve and the structure for controlling the fluid flow into the flow chamber. Figure 5a shows the reed-switch flow reversal control circuit useful with this invention. Figure 5b shows a circuit useful with the circuit of Figure 5a for producing an output voltage proportional to flow rate. Figure 6 shows a typical output voltage versus dis- placement curve used with this invention for calibrating the output voltage from a sensing element on the end of the cylinder to the position of the diaphragm within the cylinder. Figure 7 shows the microcomputer based flow con- troller structure connected to the sensing element on the end of the chamber containing the diaphragm. Figure 8 shows the relationship of the various circui boards used to process the signals from the sensor and to control the settings "of the three-way flow valves 1 and 2 (Figures 1 and 7) which allow the .fluid to pass into one or the other of the chambers in the cylinder, and which control the setting of the fluid control valve. Figure 9 shows a sensor circuit useful with this invention. Figure 10 shows the motor and solenoid driver circuit used with this invention. Figures 11a and lib show schematically the thumbwheel digit input circuit and the display circuits used with this invention; Figure 12 shows the logic diagram for the computer program used in the microcomputer shown in Figure 7 as part of the structure of this invention; and Figure 13 shows schematically the method and structur for fabricating the diaphragm with an enclosed magnet used with this invention.

Detailed Description While this invention will be described in conjunction with specific components in the electronic control circuitry, this description is exemplary only and is not intended to limit the scope of the invention. Turning now to Figure 1, a flow chamber 12 containing a right chamber 12a and a left chamber 12b separated by diaphragm 4 is shown schematically. Diaphragm 4 has mounted on its center as an integral part thereof a magnet. 5. Magnet 5 is completely coated with the material of which diaphragm 4 is constructed to protect magnet 5 from the fluid (possibly corrosive) being metered. On the left face of chamber 12 is a sensor 6b and on the right end of chamber 12 is a second sensor 6a. If desired, only one sensor (either 6a or 6b) can be used. While shown as reed switches, preferably, these sensors comprise Hall effect devices of the type known as LOHET (for "linear output, Hall-effect transducer") sensors such as described in more detail in Electronic Design 19, dated September 27, 1979, on page 23. This article is incorporated herein by refer- ence. Other Hall effect sensors can, of course, also be used with this invention. The input flow is transmitted through three-way valve 1 (shown schematically) arranged to allow the flow to pass into line 9 connected directly to left chamber 12b. The entry of fluid into left chamber 12b displaces diaphragm 4 to the right thereby expelling fluid in the right chamber 12a through line 10. Three-way outlet valve 2 is, in this mode, adjusted to allow the fluid flowing from line 10 to pass directly into the output line. During the entry of fluid into left chamber 12b, diaphragm 4 and magnet 5 move to the right toward Hall effect sensor 6a. The output signal from Hall effect sensor 6a is a function of the position of magnet 5, which in turn, is proportional as a function of time, to the rate of fluid flow through line 9 into left chamber 12b. As magnet 5 moves closer to sensor 6a due to the displace ment of diaphragm 4 to the right, the Hall effect sensor 6a produces an output signal uniquely related to the position of magnet 5. This position as a function ^"of tim is a function of the flow rate. Sensor 6a produces an output signal which is monitored in a manner to ^'be described later by the electronic control circuits. As magnet 5 reaches its rightmost position, a control signa is generated switching valves 1 and 2 such that the inpu gas now flows through line 7 into rightmost chamber 12a while the fluid in leftmost chamber 12b is expelled from this chamber through line 8 and outlet valve 2. Conse- quently,_. diaphragm 4 is forced to the left and magnet 5 now travels away from Hall effect sensor 6a and toward Hall effect- sensor 6b. The output voltage from Hall effect sensor 6b is also uniquely related to the positio of magnet 5. Since each sensor's output voltage is uniquely related to the position of the diaphragm, by measuring time independently, the sensor output voltage and thus 1_he diaphraέjm position is determined as a functi of time which allows the flow rate to be^"calculated give a calibration curve of volume versus diaphragm position (as shown in Figure 6). The use of a flexible diaphragm as part of a fluid meter is based on our discovery that, contrary to expec- tation, the diaphragm position as a function of volume o fluid in each chamber is predictable and repeatable each cycle despite the fact that the diaphra-gm is flexible an "loose" (i.e., the diaphragm is designed to interfere minimally with the fluid flow). Thus, diaphragm 4 serve to separate the left chamber 12b from the right chamber 12a while supporting magnet 5, the position of which is used to measure the fluid flow rate. The calibration of the position of magnet 5 to the output signals from senso 6a and 6b is essential to the proper operation of this system. As is apparent from Figure 1, diaphragm 4 can easily be replaced should it wear out by separating the

" two halves of cylinder 12, removing the old diaphragm and inserting a new diaphragm. Typically, to ensure a leak- proof connection, diaphragm 4 has two "O-rings," an inner "O-ring" 210 and an outer "O-ring" 211 as shown in Figure 13 (which shows the die used to fabricate the diaphragm). It is apparent from the above description that the position of diaphragm 4 is directly proportional to the volumetric flow rate of the fluid. By knowing the temper- ature and the pressure of the fluid the mass flow rate can be determined in a well known manner. When sensors 6a and 6b comprise reed switches, the output signals from these switches occur with a frequency directly proportional to the flow rate and are used directly to actuate electronic circuitry for both valve actuation and feedback or other fluid control purposes. On the other hand, when the output sensors 6a and 6b are Hall effect devices, a continuous output signal is generated from each of these sensors. This output signal, is related to the flow rate. By knowing the calibration curve of output signal level versus displacement of the diaphragm 4 and magnet 5, the volumetric flow rate can be calculated continously as a function of the output signals from sensors 6a and 6b. Diaphragm 4 is preferably made of an elastomeric material (viton is preferred but neoprene, silicon rubber and butyl rubber can also be used, as appropriate) which is suitable for use for temperatures up to 150°C (180°C for viton). For higher temperatures metal bellows can be used in place of the elastomeric diaphragm. The choice of the diaphragm 4 material depends on the particular fluid that is to be used, and the preferred operating tempera- tures. The differential pressure across the diaphragm is small in comparison to the working fluid pressures. Preferably this pressure difference is negligible. Viton is appropriate for temperatures between -40°C and 180°C and pressures between vacuum and 300 atmospheres.

^' The diaphragm with encapsulated magnet is made by a compression or transfer molding process. In this process (illustrated in Figure 13), a metal die 200 containing upper section 200a and lower section 200b, is fabricated to the exact dimensions of the diaphragm. Die section 200b includes a central cavity 200c to house the magnet 212 (corresponding to magnet 4 in Figure 1). A thin disc of the elastomer material 213 having the same or slightly larger diameter as the magnet disc 212 (approximately ^~_ inch and preferably formed of Alnico 8 or Cemarium cobalt) is first inserted into the magnet cavity 200c and the magnet 212 is placed on top of this thin disc. A pre- weighed amount of the elastomer raw material 214 is then put on top of the magnet 212, the material is heated to about 400°F when Viton is the material and pressure is applied to it by the upper half 200a of the die 200 to mold and cure the elastomer 214 ^■to the desired diaphragm shape. The pressure is merely that sufficient.to achieve the desired result. The compression is conducted at an elevated temperature whose magnitude depends on the particular elastomer and results in elastomer material 214 and 213 assuming a substantially uniform thickness (typically 0.015" to 0.020" when Viton is the material) and consistency throughout the die 200. This operation ensures complete encapsulation of the magnet by the elastomer and excellent control of the diaphragm thickness A Viton diaphragm typically has a durometer of fifty (50). A particularly suitable valve for use as valves 1 and (Figures 1 and 7) is the D30 three-way valve made by Precision Dynamics Company. This valve switches within about eight milliseconds and is fabricated out of 303 and 430 stainless steel with viton elastomer for the seals and O-rings. Other valves are also appropriate depending on design requirements. The flow measurement by this device is reproducable well within one percent. Diaphragms or bellows can be easily replaced before fatigue sets in. Figures 2a and 2b show two configurations for the diaphragm inside the cylinder. In Figure 2a, a diaphragm has a magnet mounted internally to it which is protected by the material of the diaphragm. The diaphragm is then connected and sealed to the ends of two bellows. Each bellows is capable of contracting or expanding in response to lateral movement of the diaphragm in response to fluid entry into one or the other chambers of the cylinder. Thus when fluid enters the left chamber of the cylinder, the diaphragm and the magnet move to the right and the fluid in the right chamber is expelled. When fluid enters the right chamber, the magnet and the diaphragm move to the left expelling the fluid in the left chamber. A magnetic sensor mounted on the cylinder detects the motion of the magnet and thereby produces an output signal pro- portional to the position of the diaphragm. Typically the bellows comprises either a metal or polymer material and the diaphragm likewise comprises a polymer or-metal material. Figure 2b shows a different construction wherein the diaphragm is attached between two portions of the cylinder. Again, a magnet 5 is mounted on the diaphragm 4 and coated with the diaphragm material thereby to protect it from the fluid whose flow is being measured. The entry of fluid to the left chamber 12b displaces diaphragm 4 and magnet 5 to the right as with the structure of Figure 2a and similarly the entry of fluid to the right chamber displaces the diaphragm 4 and magnet 5 to the left, again as with the structure of Figure 2a. The diaphragm is constructed such that its motion to the right or left occurs with very little friction or resistive force. Thus the flow of the fluid is not disturbed by the presence of the diaphra-gm. In addition, the weight of the diaphragm is kept very low thereby minimizing the inertia of the diaphragm. Magnetic sensors 6b and 6a are mounted on the left and right walls of the cylinder to detect the movement of the diaphragm- mounted magnet 5 to or from a given wall. In both Figures

2a and 2b a conventional set of two three-way flow valves (such as shown in Fi ure 1) is used to first route the fluid into one chamber and out of the other chamber and then to reverse this pattern. Contrary to the prior art meters using a free flowing piston, wherein the fluid whose flow is being measured can often leak from the left chamber to the right chamber and vice versa, this invention uses a flexible, low inertia diaphragm to seal one chamber from the other and thereby to prevent leakage while at the same time providing a relatively instantaneous measure of fluid flow rate. Figure 3 shows the structure of Figure 1 (or the chambers of Figures 2a and 2b), in combination with an electronic controller 30, a DC stepping motor 31, and a clutch or coupling 32 joining the stepping motor to a valve 33 (typically a needle flow valve) for controlling the flow of fluid. The DC stepping motor 31 adjusts the position of the valve 33 until the flow rate detected by the meter corresponds to a flow rate setpoint input to the electronic controller 30. As will be shown later, the electronic controller 30 preferably comprises a micro- processor controlled digital circuit with an analog-to- digital converter, a sampling circuit, buffer stores, memory and selected input and display elements. The electronic controller 30 also controls the^* setting of the two three-way valves 1 and 2 to ensure that the fluid flow into the meter and from the meter is reversed at appro- priate times to obtain maximum accuracy in the flow measur ents. The system provides accurate and responsive feed- back (or feed forward if desired) control. In the simples form, the flow into one side of the cylinder 12 is reverse when the diaphragm reaches its extreme position one way or the other. The flow rate can, in this embodiment, be simply measured by the time it takes for the diaphragm to travel between the two extremes. That is, the flow rate is equal to the volume between the two extreme positions

1 of the diaphragm 4 divided by the time taken by the

2 diaphragm to travel between these two positions.

3 Figures 4 and 5a show an embodiment of this invention

4 using a reed switch to detect the maximum displacement of

5 the diaphragm adjacent each of the two walls of the

6 cylinder 12. The reed switch signal is transmitted to a

7 microcomputer control 30 which then calculates from the

8 time taken for the two reed switches 46a and 46b to be

9 sequentially actuated, the measured flow rate. This

10 measured flow rate is compared to a reference flow rate

11 set into memory and the difference is used to set a control

12 valve 33 to bring about the proper flow rate. Solenoids

13 and solid state relays are also actuated by the micro-

14 computer control 30 to reverse the fluid flow into

15 cylinder 12 at the maximum displacement points of the

16 diaphragm 4.

17 Figure 5a shows a circuit schematic of the structure

18 used to respond to the change in state of the r-eed switches

19 46a and 46b due to the approach of magnet 5. A flip flop

20 comprising two 7400 NAND gates 41 and 42 has as one input

21 signal to each of the NAND gates the output signal repre-

22 senting the state of a given reed switch. Thus normally,

23 when reed switch 46a is open, the signal level on input

24 lead 41a to NAND gate 41 is at a high level corresponding

25 to the 5 volt DC supply voltage. The other input lead 41b

26 is coupled to the output lead 41d from the other NAND gate

27 42. The output signal on lead 41d is normally high level

28 for at least one low level input signal. Thus, with the

29 signal on output lead 41c low level, the signal on input

30 lead 42b is low level and the signal on output lead 41d

31 from gate 42 is high level, thereby holding the output

32 signal from gate 41 at low level. When reed switch 46a is

33 closed, the input signal on lead 41a to NAND gate 41 goes

34 low thereby driving the output signal from NAND gate 41 to

35 a high level. This high level output signal is transmitted

36 to input lead 42b of NAND gate 42 and drives the output

37 signal from NAND gate 42 to a low level thereby latching •38

- - -- --^ι -- -:--τ up the output of NAND gate 41 to a high level. The high level output signal from NAND gate 41 is amplified by amplifier 43 and turns off transistor QIO (2N2904) thereb changing the current through a coil to close two relay control switches thereby activating solenoids to change the settings of the two thre.e-way valves 1 and 2 shown in Figure 1 and thus to reverse the flow. When diaphragm 4 arrives at the other side of the cylinder 12, reed switch 46b closes thereby driving the output signal from NAND gate 42 from low level (corresponding to two high level input signals) to high level thereby driving the output signal from NAND gate 41 to low level. This low level output signal is also amplified and used to turn on transistor QIO thereby again activating a relay to reverse the two three-way flow valves 1 and 2 (Figure 1) and thereby again to reverse the fluid flow. Figure 6 shows a typical curve of output signal from a Hall effect device (such as sensor 6b or 6a.in Figure 2b ) versus position of the flow diaphragm 4. This curve is substantially linear over short portions but gradually flattens out as the diaphragm 4 moves away from the Hall sensor. The slope of voltage versus position (i.e., dis- placement) is negative such that the output voltage as a function of the distance of the diaphragm from the sensor increases with decreasing distance of the diaphragm from the sensor. Operation of the sensor in a region of substantially steep slope gives greater sensitivity and accuracy to the measurement of the fluid flow than does operation in a region of flatter slope. As will be discussed shortly, this feature is used -to enhance the accuracy of certain flow measurements. Figure 7 discloses the preferred embodiment of this inventio using a microcomputer-controlled digital circuit to provide proper feedback signals to control the flow rate. The microcomputer 81 operates on an output.signal produced from the Hall effect sensor 6b mounted on the wall of the chamber 12 containing the flexible diaphragm 4 with magnet 5 formed as an integral part thereof. Figure 7 shows in block diagram form the electronic control circuitry used to process the information produced by the sensor 6b attached to chamber 12 containing the flexible diaphragm 4 used to measure flow rates in ac- cordance with the invention. The output signal from Hall effect sensor 6b is transmitted through sensor interface circuit 73 to analog switch 74. Analog switch 74 comprises in one embodiment a well-known device for selecting a particular signal path in response to digital input signals (input to switch 74 on lines 74a from control logic 76a) for the purpose of passing a selected signal from either a pressure transducer 72a and a temperature transducer 72b (for the purpose for allowing the mass flow rate to be calculated from the volumetric information produced from the si-gnal generated by sensor 6b attached to flow meter chamber 12) or from sensor interface circuit 73-. - The output signal from analog switch 74 is trans- mitted to an analog-to-digital converter 75 of well known construction. Preferably, this converter comprises a twelve bit converter such as is used with the Analog Devices RT1-1220 Data Acquisition Board 84 (Figureβ 7 and 8). The output signal from A-to-D converter 75 comprises a digital signal representing any one of 4,096 possible signal levels. Of course, by selecting an A-to-D converter containing a different number of bits, a different level of accuracy can be obtained. The output signal from A-to-D converter 75 is then transmitted to input buffer 76e. Input buffer 76e buffers the output signal from A-to-D converter 75 and holds this information until a request for this information is received from microcomputer 81. Microcomputer 81 • comprises a Mostek MK79612 CPU and Timer Board which contains a CPU corresponding to the well known Z80 microprocessor. The MK79612 is shown in more detail in the Mostek publication entitled "MD Series Microcomputer Modules, Operations

Manual for MDX-CPU 1" and subtitled "Z80 Central Processor Module MDX-CPU 1", copyright 1978 by Mostek Corporation. This document is also incorporated herein by reference. Figure 8 shows the relationship of the Mostek MK79612 to the remainder of the circuit, the components of which are also shown in more detail in Figure 7. The control logic 76a, input buffer 76e, A-to-D converter 75 and analog switch 74 comprise the Analog Devices RTI 1220 data acquisition board 84 (shown as such in Figure 8) . The output latches 76b, 76c and 76d comprise the Pro-Log 7601 TTL I/O board 83 also shown in Fugure 8. The program memory of the microcomputer 81 comprises the Mostek MK79604 Eprom/UART board 82 shown as such in Figure 8. The data bus interconnecting the CPU timer and the Eprom/UART portions of the structure to the Pro-Log 7601 TTL I/O board and the Analog Devices RTI 1220 data acquisi tion board comprises the STD bus, a standard bus used by Mostek and Pro-Log for interconnecting the components of a typical eight bit microcomputer system using an eight bit microprocessor (such as the Z80). The operation of the STD bus is described, for example, in the Pro-Log publi- cation copyrighted 1979 entitled "Series 7000 STD Bus, Technical Manual." The operation of this bus is thus well know in the art and will not be described in detail. The above cited Pro-Log technical manual is incorporated herein by reference. Control logic 76a generates several sets of output signals. First this logic generates a set of signals for- controlling the setting of analog switch 74. These signal are transmitted on lead 74a. Logic 76a is driven by signals taken off the STD bus and generated by micro- computer 81. Output latch 76b (part of TTL I/O Board 83) generates a signal to actuate driver circuit 79b which in turn produces signals which operate three-way valves 1 and 2.

? -^*-*--—*^■ —— -^a

Driver circuit 79b is shown in more detail in Figure 10 and will be described below. Additional signals from output latch 76b also actuate driver circuits 79b which in turn drive stepper motor 79c. Stepper motor 79c controls the setting of control valve 79d which controls the flow rate though valves 1 and 2. Thus the output of latch 76b (derived from microcomputer 81) controls the setting of valve 79d in response to the flow rate measured from the signals produced by sensor 6b. The reference signal used to determine the magnitude and direction of change in the position of valve 79d is derived by comparing the signal representing the flow rate computed from the signals from sensor 6b with another signal placed in input buffer 76c and derived from the setting of thumbwheel 77. The setting of thumbwheel 77 can be varied as desired by the operator thereby changing as desired the setting of . control valve 79d. Basically, thumbwheel 77 converts a setting visible to the -user to four binary-coded decimal digits (corresponding to 16 bits). These signals are held in input buffer 76c and are used by microcomputer 81 to calculate the proper control signal to be transmitted through output - latch 76b to control the setting of valve 79d. Output latch 76d is configured to retain the output signals from microcomputer 81 corresponding to the latest reading of the flow rate. The signals retained in latch 76d activate display 78 to display the latest value of flow rate calculated by microcomputer 81. Structures corresponding to those shown in Figure 7 are shown in Figure 8. Those elements shown in block diagram form in Figure 8 function as described above in connection with Figure 7 and thus will not be described in more detail here. Figures 11a and lib show in more detail the thumb- wheel circuitry 110a through 110b and the display circuitry 114a through 114b used with this invention. The thumbwheel is capable of inputting four digits into the circuit.

Each digit circuit 110b, 110c and llOd comprises a replica of the specific circuit 110a shown figuratively for digit one. This circuit is of a type well known in the arts and thus will not be described in detail except to say that if the thumbwheel is set, for example, on a 7, the switches within the thumbwheel corresponding to the 4, 2 and 1 level signals (connected to the 5V supply voltage through resistors 112b, 112c and 112d, respectively), are closed thereby to provide an output signal for the TTL input at a level corresponding to the complement of 7 (negative logic). Any other decimal digit from 0 to 9 is selected by closing the corresponding switches to provide an output signal of the proper level. The display likewise comprises a four digit display. Each display 114a, 114b, 114c and 114d comprises a well known decoder driver for taking a BCD input and converting it to a digital number ranging from 0 to 9. Typically, each display comprises an HP 7304 display of a type well known in the art. Figure 10 shows in more detail a typical drive circui of the type used to drive the stepper motor 79c and the solenoid driven three-way valves 1 and 2 (the latter two valves being used as described above to reverse the flow in chamber 12). The driver circuits are driven by signals on input leads do through d5 derived from the TTL I/O card (Figures 7 and 8). The particular stepper motor windings to be energized depend upon the setting of the stepper motor (a record of which is recorded in the RAM memory of microcomputer 81) and the direction in which it is desired to move the stepper motor. The stepper motor will move a standard distance (typically (1/200)th of a revolution) once each step. A timer in the microcomputer allows the generation of a new step after a fixed time has elapsed. In the embodiment of this invention, this time is 7.5 milliseconds. The timer on the microcomputer board 81 interfaces with the microcomputer central processing unit (CPU) via interrupts. The timer generates periodically

signals which are transmitted to the CPU on a separate line thereby to activate an interrupt circuit within the CPU through an interrupt pin. This signal then activates the CPU to calculate the next setting for the stepper motor; that is the CPU determines whether the stepper motor should be driven such that the control valve 79d is either opened or closed based upon the last flow rate reading present in the microcomputer when compared to the thumbwheel setting. Typically, the stepper motor is driven by a sequence of signals on input leads DO through D3 corresponding to hexadecimal 5, 9, 6, A. Thus if the setting of the stepper motor corresponds to a 9, then the hexadecimal encoded binary 6 transmitted on input leads DO through D3 will activate the stepper motor to move one setting in the proper direction to open. Should the stepper motor be instructed to close rather than open, then a hexadecimal encoded 5 would be transmitted in binary form on leads DO through D3. In this latter case wherein the most significant digit corresponds to. a zero, the second most significant digit corresponds- to a one, the third most significant digit corresponds to a zero and the fourth most significant digit corresponds to a one (corresponding to the signals 0101 on leads D3 through DO, respectively), then the "1" on lead DO will drive the output signal from inverter 101 to a low level thereby turning on transistor Ql and energizing winding Wl. Diode Dl prevents voltage pulses generated by changing the current through winding Wl from burning out transistor Ql and resistors 102 and 103 comprise pull-up and base-drive . resistors, respectively. Figure 9 shows the circuitry associated with the Hall-effect sensor 6b. The magnetic flux from the magnet 5 mounted within, and as an integral part of, diaphragm 4, is converted to a voltage and amplified to produce an output signal. Hall-effect sensor 6b preferably comprises part number 633SS2 made by Microswitch, Inc., a division of Honeywell. The output signal from microswitch 90 is

— " ^r- ' ' "~- transmitted via twisted-pair cable 94 to Analog Devices data acquisition board 84 (Figures 7 and 8). There this output signal activates the processor to operate in a way previously described. Pull-down resistor 92 (100 ohms) is connected between the fifteen volt power supply in series with a 5.1 volt zener diode 91 to ground. Variable resis 93 (100K) is connected across the node between resistor 92 and diode 91 and ground. Resistor 93 is used to produce a bias offset for the other lead in the twisted pair 94 transmitting the output pulse from microswitch 90 to the data acquisition board 84. This bias offset comprises a way of compensating for the fact that the curve of flux versus voltage for the Hall-efffect sensor does not pass through the origin. By adjusting the setting of variable resistor 93, the input signal to the control circuitry is offset (i.e., zero adjusted) to provide a signal within a desired range of magnitude. Operation of the above described structure is imple- meήted by a software program. The Microl high-level language version of this program is attached to this application as Appendix A. This program uses the Microl Language which is described in the User's Manual, Microl Language, dated March 8, 1979. This Manual is incorpor- ated herein by reference. Figure 12 illustrates the logic flow diagram of the computer program devised to operate microcomputer and timer 81 (Figures 7 and 8) in accordance with this inven- tion. The computer program is designed to operate on the output signals from sensors 6b as processed by the data acquisition board 84 to determine flow rates. To do this one of several algorithms is employed. In the preferred mode of operation the flow rate is measured on a relativel continuous basis as a function of the displacement of diaphragm 4 across chamber 12 with time. This preferred mode does not depend upon the reversal of the direction of motion of diaphragm 4 to measure the flow rate but does set an optimum reversal point for changing the direction

-i of motion of diaphragm 4 to ensure that at least a minimum

2 voltage difference from sensor 6b as a function of the

~ location of diaphragm 4 is obtained in a given time. In the limit, the minimum voltage difference per sample -can

•- be expanded to a value corresponding to the reversal point r of the diaphragm. In this situation, the preferred mode η reduces to the second, reversal dependent mode. In essence, o the software emulates the operation of the reed switch _q mode, but in addition provides an autoranging capability

10 (to be described later)

.,, The second mode of operation contemplated for use P with this invention is a reversal dependent mode. The 1 n program parameters are set to cover the highest and lowest , . expected flow rates (which correspond to the shortest and ,e longest times for diaphragm 10 to complete one cycle). ., r The setting of the reversal position for reversing the 1 η direction of motion of diaphragm 4 closer to its central

18 neutral position results in a decrease in the cycle time. 19 In this mode of operation, the reversal point is set to 20 ensure at least one sample within some specified time for

2-_| the lowest expected flow rate. In one embodiment, this

22 specified time is on the order of two (2) seconds. This 23 time must be much greater than eight milliseconds, the 24 switching time of the valves. 25 In describing the operation of the program of this 26 invention, certain conventions must be defined. Thus in 27 the following description, a "conversion" comprises one 28 look at the voltage produced by sensor 6b reflecting the 29 position of diaphragm 4. 30 The average of four conversions comprises one "reading. „.. The signal representing the average of these four con¬

32 versions is a digital signal as is the signal representing 33 each conversion. 34 Continuous readings are then made of the output 35 signal from sensor 6b on a periodic basis until a change 36 in voltage from 6b in excess of a minimum voltage change 37 38

1 (DELMIN) is obtained. At this time, the system has com-

2 pleted one "sample."

3 The system actually takes four conversions at the

4 start of operation and continues taking groups of four

5 conversions and averaging each group of four. Since it

6 takes about 25 microseconds for each A-D conversion and

7 there are four conversions per reading, 100 microseconds

8 are required at a minimum for one reading. After each

9 sample, the program tests to determine whether the direc-

10 tion of movement of the diaphragm should be reversed.

11 Every seven and one-half milliseconds or thereabouts there

12 is an interrupt and for a few microseconds the program

13 then decides whether stepper motor 79c should be instructe

14 to step valve 79d in one or another direction.

15 Every flow rate calculated from each sample is sent

16 to a memory location called "FLOW." By comparing the

17 calculated flow rate to the set point (placed in thumbwhee

18 77, Figure 7) using the relationship "set point minus flow

19 rate," a difference signal is obtained. Multiplying this

20 difference signal by some non-negative control function

21 gives a gain for use in determining the proper change in

22 position of valve 79d. This gain is placed in "STPSIZ." ^'23 The non-negative function is in turn a function of "set

24 point minus flow rate" and can also be a function of one

25 or more previous "set point minus flow rate" measurements.

26 A separate interrupt program called "s-timer" looks every

27 !^•_ milliseconds at STPSIZ to decide whether to step up or

28 to step down the valve.

29 In the above calculation, the program uses the sub-

30 routine "GETFLO" to calculate the flow. Subroutine

31 "NEWVLV" corresponds to the control function which gener-

32 ates the new valve position. "STPSIZ" corresponds on a

33 one-to-one basis to the steps on a valve. It then takes

34 7.5 milliseconds for the valve 79d to make one step. The

35 program does not sample while the valve is opening or

36 closing. 37

^'38

_„ Once sampling is started, a sample is always obtained before the direction of motion of diaphragm 4 is reversed and before it is necessary to reverse the motion of diaphragm 4. An important part of the system is the cali- bration table calibrating the volumetric displacement of the diaphragm to the output signal from sensor 6b. To ensure an accurate conversion of the output signal from sensor 6b into a flow rate, the volumetric displacement of the diaphragm 4 represented by any given signal from sensor 6b must be determined accurately. Techniques for doing this are well known. One such technique comprises the discharge of a fluid from the output line into a vertical stand pipe in which the discharged fluid or gas displaces a colored liquid. By calibrating the stand pipe in terms of milliliters or cubic centimeters, for example, the volumetric displacement of diaphragm 4 can be measured with great accuracy. ^' Figure 6 shows a curve of voltage from sensor 6b versus volumetric displacement of--diaphragm 4. While the structure in Figure 7 has been described as using one Hall effect device sensor, using two Hall effect devices, one on each side of chamber 12, yields twice the sensitivity to the measurement of flow rate. By using two Hall effect devices, the range of the devices is doubled. The diaphragm 4 can then travel a maximum excursion distance in chamber 12 and during its travel in the left portion of the chamber, sensor 6b is used while during its travel in the right portion of chamber 12 sensor 6a is used. In this manner, both sensors are operated in their range of maximum sensitivity and thus a sensor operating in its maximum range of sensitivity is used over the full travel of the diaphragm 4. The thumbwheel 77 (Figures 7 and 8) is used to place into the system a "set point" which determines the flow rate to be allowed by valve 79d. The set point is placed into the thumbwheel. The system then measures the differ- ence between a new set point and the old set point. The program then loops back through the set point change logi and produces an output signal proportional to the differ- ence between the new set point and the old set point. If there is no change in the set point during this loop back the system then looks at a measured variable called "sampling." The concept of "sampling" means taking a reading, calculating a diaphragm displacement from the reading, starting a timer within the system, measuring the output voltage from sensor 6b and testing to determine whether the minimum change in voltage is greater than a selected value. In the preferred embodiment, the minimum voltage change required to be detected from sensor 6b before a flow rate is calculated is 200 millivolts. Thus in readi voltage when sampling, a sufficient voltage change is allowed to ensure that the minimum voltage change has occurred or a maximum time has elapsed without having this minimum voltage change occur. If in this maximum time the system does not record a minimum voltage change (DELMIN) the system then assumes zero flow and opens the valve 79d (Figure 7). If the proper minimum voltage change (DELMIN) is obtained, the system then takes the measured voltage from sensor 6b and refers to the proper place on the voltage- displacement calibration curve (Figure 6) to calculate the displacement change over time. From the displacement change over time and the time, the average flow rate over this time is calculated. Referring now to the calibration curve (Figure 6) it is apparent that as the flow rate becomes lower, the displacement in a given time becomes less and the reversal point on the curve must move from right to left. That is, the diaphragm travels a smaller distance in a given time for a low flow rate than for a high flow rate and thus to maximize the sensitivity of voltage versus displacement, one must operate on the left-most portion of the curve rather than on the flatter right portion of the curve. The right most (farthest from sensor 6b) reversal point is selected to ensure that magnet 5 does not hit the wall and that there is time to generate a voltage change equal to DELMIN between the reversal point and the wall. The reversal point closest to sensor 6b is selected by a formula C,-flow x C„ where C-, and C_? are selected constants equal to 3800 and 5, respectively, in the program of Appendices A and B. The logic flow diagram shown in Figure 12 describes the logic of the software program shown in Appendices A and B. The program is implemented in Microl, a block structured language for implementing programs on the Z80. This language is written in PASCAL and modeled after PASCAL. The Microl compiler produces the Z80 assembly language which is assembled and then linked with other modules to form the final object code. Microl is a publicly available high level language and is described in a document entitled "User's Manual Microl Language, 8 March 79." This document is herein incorporated by reference. Referring to Figure 12,- at the start of the program, power on reset results in the program going to "JRESET" which initializes the processor (CPU) and timer, stepper motor and valve. Essentially the program closes the valve and turns off the timer. The program then jumps to the main control algorithm represented in the Microl procedure by M1STRT. The main control algorithm calls these other Microl procedures to implement the computation of flow or displace- ent or new valve setting. MlSTRT and these other Microl procedures call numerous short assembly language procedures to implement low level functions directly on the hardware (such as moving the stepper up or down one step or output- ting to the display LEDs from a specified register). The program includes routines for handling two vectored inter- rupts (i.e., means in the hardware and program for jumping to different locations in memory when the two interrupts occur) generated by the timer. One interrupt is activated by the timer to keep track of elapsed time during a sampl by incrementing a register or memory location every one- half microseconds. Another interrupt is activated^' by the stepper timer which generates an interrupt every 1%. milli seconds and vectors to the interrupt servicing procedure (STIMER) to determine from memory location (STPSIZ) wheth to move the stepper motor up or down or not at all. Once the program has been initialized, the program checks to determine whether or. not the system is sampling. If the answer is "no," the program then checks to determine whether the flow into chamber 12 should be reversed. Thi test, which comprises measuring the output of sensor 6b t determine whether diaphragm 4 has reached its minimum or maximum point of excursion, yields either a "yes" or "no." If the answer is yes, the flow should be reversed- The program then initiates the subroutine which switches the solenoids which drive valves 1 'and 2 (Figures 1 and 7) through driver circuit 79b and initiates a delay-to ensur that the flow has actually reversed and the transients in the system have settled before starting to sample to measure flow rate during the reverse motion of the diaphragm. if the logic indicates there is no need to reverse flow, the system then determines whether or not there has been a set point change. If "yes," the valve 79d is adjusted by measuring the difference between the new set point and old set point. If the answer is "no," the system moves directly to the logical block stepper motor. If the valve was adjusted in response to a set point change, after the valve adjustment is completed the system also moves to the stepper motor logic. The steppe motor logic determines whether or not the stepper motor has moved to its desired position. If the answer is "no," then the system goes back to the initial sampling logic block. If the answer to "stepper motor done?" is "yes," the system begins a new sample and returns to sampling. If the output of the system sampling block is "yes," the system determines whether the output of the sampling

^ _~Z- f O.' ^• _ _-„„^*,_.-». xλ'_ _ ^; compared to a reference sample is greater than DELMIN. If the answer is "yes," the system determines whether or not the time is greater than the minimum time. If the answer is "yes," then the system computes a new flow rate and, depending upon the time, adjusts the auto range of the system. This last adjustment is an adjustment to the reversal point of diaphragm 4 by changing the level of the output signal from sensor 6b at which the direction of motion of diaphragm 4 is reversed. Once auto range has been completed, a new valve position is calculated from the flow rate measurement compared to the set point and valve 79d is appropriately adjusted. Finally an end of sample signal is produced which then causes the program to initiate sampling again. If on the other hand the output signal from the DELMIN logic determines that the difference in the output signal from sensor 6b is less than the minimum required, a test is run to determine if the time between this sample and the previous sample is -greater than the maximum time. , If the answer is "yes," then a new flow rate is calculated and the auto range is adjusted as in the preceding sequence. If the answer is "no," then the system tests to determine if there has been a set point change. If the answer is "yes," the valve is adjusted as described above. If the answer is "no," the system loops back to run another test to determine if the new sampling voltage is greater than DELMIN.. The particular lines on the flow sample in the micro- compiler version of the program shown in Appendix A which implement the particular logic block in Figure 12 are shown on Figure 12. Appendix B gives the assembly language procedures called for by the Microl procedures in Appendix A. As a feature of this invention, for applications not requiring the precision and versatility of computer con- trolled logic circuitry, several lower cost embodiments are possible using either the reed switches or the Hall effect devices- A multiple se-g ent down counter can approximate the flow rate by counting down from a "maximum flow" between flow reversals. The rate of down counting is varied after a time interval lapses (the device will count slower after each elapsed interval). By this method, the function f = - is approximated by several straight line segments (where f equals the flow rate, c equals the count and t equals the time interval which has elapsed). This method achieves moderate accuracy over a limited range with good repeatability and produces a direct digital output for very low cost when implemented using discrete logic. A further improvement is to continuously vary the rate of down counting by using, for example, a capacitive discharge to drive a VCO whose oscillations are then used to drive the down count. It may be necessary to use a capacitive charge if the VCO has a negative voltage to frequency characteristic. In this case a baseline (i.e., zero bias) count would also be taken and subtracted to produce the. direct digital representation of the flow. The capacitive discharge itself can produce an approximation of the flow as a voltage. Accuracy and range is limited but can also be improved by multiple interval method described above with respect to the count- down technique. The above embodiments disclose the use of sensing devices on the external walls of the chamber. Under some circumstances, the Hall-effect sensor can be molded into the diaphragm (with lead wires also in the diaphragm) and the magnets can be placed on the external walls of the cylinder- Compensation for temperature can be done in either the transducer or externally by a computer using a temperature input. Likewise, compensation for pressure. changes can also be done in a similar manner. Figure 5b illustrates a circuit which produces an output signal inversely proportional to time and therefore provides an output signal directly proportional to the

flow rate. In this circuit, a reference voltage .is applied to the negative input lead of operational amplifier 54 through input resistor 51. The positive input lead of operational amplifier 54 is connected through resistor 57 to ground. The reference signal is integrated by capacitor 53 in a well known manner when the gate voltage on reset FET transistor 52 is such that this transistor is turned off (i.e., non-conducting). The negative going output signal from operational amplifier 54 across capacitor 53 is then applied to the gate of depletion mode N-channel FET transistor 56. This transistor is a linear FET device with the source-drain resistance linearly proportional to the gate voltage. Thus as the gate voltage decreases linearly with time, the source-drain resistance of this transistor (a depletion mode device is normally conducting) increases with gate voltage. Thus, the output voltage from operational amplifier 55 (the negative input lead of which is connected to a reference voltage through input resistor.R (__• and the positive input lead of which is connected to a suitable reference) drops hyperbolically with time (since its output voltage is proportional to 1/R„ where R_^ is the source to drain resistance of linear FET 56). Accordingly, at the time FET transistor 52 is turned on to discharge capacitor 53, the output voltage from operational amplifier 55 is proportional to the flow rate. Typically, FET transistor 52 is reset at each flow reversal of fluid into cylinder 12. Thus^' the output voltage from operational amplifier 55 at this time represents the flow rate and can be sampled and suitably operated on by the other components of this invention, in the manner described above.

Claims

We claim: 1. Structure comprising: a chamber containing a first and a second opening through which fluid can pass; a flexible diaphragm located in said chamber so as to divide said chamber into two portions, a first portion being accessed through said first opening and a second portion being accessed through said second opening; a magnet attached to said flexible diaphragm; means for directing fluid whose flow is being measured through said first opening into said first chambe while withdrawing the fluid whose flow is being measured through said second opening from said second chamber and, in response to a control signal, reversing the chambers i which the fluid is inserted and from which the fluid is withdrawn, the movement of fluid into one chamber and out of the other chamber causing said flexible diaphragm to move into the chamber from which the fluid is being with- drawn; means for producing an output signal represen- tative of the position of said magnet; means for converting said output signal to a sequence of digital signals,- means for processing said sequence of digital signals to produce a second signal representative of the flow rate of said fluid into and out of said chamber; means for comparing said flow rate to a refer- ence flow rate to produce a control signal representative of the difference between said measured flow rate and said reference flow rate; and means, responsive to said control signal, for changing the flow rate of said fluid. 2. Structure as in claim 1 including: means for sensing the approach of said magnet to one or the other ends of said chamber and for switching the flow of fluid into said chamber from said first portion to said second portion and for switching the flow of fluid from said chamber from said second portion to said first portion. 3. Structure as in claim 1 wherein said magnet is formed as an integral part of, and is completely enclosed by, the material of said flexible diaphragm. 4. Structure as in claim 2 including reference means representing the relationship between the position of said magnet and the volumetric displacement of said diaphragm, thereby to enable the determination of the volumetric displacement of said diaphragm from the output signal from said means for producing. 5. Structure as in claim 4 including: means for varying the position at which the motion of said flexible diaphragm is reversed by deter- mining the flow rate of said fluid and selecting a reversal point to maximize the sensitivity of the output signal from said means for producing as 'a function of the displace- ment of said flexible diaphragm. • * 6. Structure as in claim 4 including: means for reversing the direction of motion of said flexible diaphragm in response to the expiration of a predetermined time. 7. Structure as in claim 1 wherein said chamber is cylindrical. 8. Structure which comprises a chamber containing two openings therein; a flexible diaphragm containing as a part thereof a magnet, said diaphragm separating said chamber into a first and a second portion and sealing said first portion from said second portion so as to prevent leakage of fluid from said first portion to said second portion or vice versa; means for producing an output signal represen- ^" tative of the position of said diaphragm; means for selectively controlling the flow into said first portion and out of said second portion and for reversing the flow as desired so that the fluid flows into the second portion and from the first portion; means for processing the output signal from said means for producing including switching path means for selectively acces- sing the output signal from said means for producing conversion means for converting said output signal from said means for producing to a first digital signal; buffer means for storing said first digital signal from said conversion means; means for inputing to said system a second digital signal representing a desired fluid flow rate; means for storing said second digital signal representing said desired fluid flow rate; processing means for operating on said first and second digital signals to produce an estimate of the flow rate of fluid into and out of said chamber; . . means for storing a signal representative of the flow rate calculated by said processing means; and driver circuit means periodically actuated by said output signal from said processing means to move a control valve either open or closed in response to the output signal stored in said means for storing. 9. Structure as in claim 8 including means for storing the output signal from said processing means representing the calculated flow rate; and means for displaying the calculated fluid flow rate. 10. The method of measuring a fluid flow rate using a chamber containing a first and a second opening through which fluid can pass with a flexible diaphragm located in said chamber so as to divide said chamber into two portion a first portion being accessed through said first opening and a second portion being accessed through said second

■ opening, and a magnet attached to said flexible diaphragm, comprising: directing the fluid whose flow is being measured through said first opening into said first chamber while withdrawing the fluid whose flow is being measured through said second opening from said second chamber and, in response to a control signal, reversing the chambers in which the fluid is inserted and from which the fluid is withdrawn, the movement of fluid into one chamber and out of the other chamber causing said flexible diaphragm to move into the chamber from which the fluid is being with- drawn; producing an output signal representative of the position of said magent; converting said output signal to a sequence of digital signals; processing said sequence of digital signals to produce a second signal representative of the flow rate of said, fluid into and out of said chamber; comparing said flow rate to a reference flow rate to produce a control signal representative of the difference between said measured flow rate and said reference flow rate; and changing the flow rate of said fluid in response to said control signal.