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Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications. Wachstum und Modellierung von Blei-Zirkonat-Titanat ...
Lead zirconate titanate thin films of composition PbZr0.52Ti0.48O3 were grown on AISI 304 stainless steel substrates by pulsed laser deposition with {001} ...
Oct 19, 2021 · Cardoletti, Juliette (2021) Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications.
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Feb 29, 2024 · We have developed a method to grow crack-free PZT films on Si substrates. The fabrication procedure entailed the use of TiO 2 as a buffer layer and post ...
Nov 9, 2021 · These films require annealing temperatures beyond 600 °C to crystallize in the desired perovskite phase, which exhibits outstanding piezoelectric coefficients.
Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications · Ultra-thin fatigue free lead zirconate titanate thin ...
Many thin-film fabrication techniques have been used to deposit PZT thin films, such as pulsed laser deposition [4], radio frequency sputtering [5], metal- ...
In this paper, the preparation and characterization of Pb(Zr0.52Ti0.48)O3 thick films deposited on Pt/Ti/Si3N4/SiO2/Si substrate by chemical solution deposition ...
Sep 9, 2020 · The deposition of lead zirconate titanate thin films on various substrates such as Si, Pt-coated Si, glass, or single-crystal perovskite.