Jan 1, 2016 · As a consequence of the missing hydrogen during deposition, sputtered a-Si forms a rough surface compared to CVD a-Si. Atomic force microscopy ...
Influence of post-hydrogenation upon electrical, optical and structural properties of hydrogen-less sputter-deposited amorphous silicon. S. Gerke a,⁎, H.-W ...
Post-hydrogenation leads to a decrease of the number of localized states within the band gap. Optical band gaps (Taucs gab as well as E04) can be determined to ...
Influence of post-hydrogenation upon electrical, optical and ... - KOPS
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This relatively low minority carrier lifetime indicates high disorder of the hydrogen-less sputter deposited amorphous network. Post-hydrogenation leads to a ...
As a consequence of the missing hydrogen during deposition, sputtered a-Si forms a rough surface compared to CVD a-Si. Atomic force microscopy points out that ...
Influence of post-hydrogenation upon electrical, optical and structural properties of hydrogen-less sputter-deposited amorphous silicon · Sebastian Gerke, H.
In this study intrinsic and doped, hydrogen less amorphous silicon films are RF magnetron sputter deposited and post hydrogenated in a remote hydrogen plasma ...
Influence of post-hydrogenation upon electrical, optical and structural properties of hydrogen-less sputter-deposited amorphous silicon ; ISSN/ISBN: 0040-6090.
Influence of post hydrogenation upon electrical, optical and structural properties of hydrogen less sputter deposited amorphous silicon.
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Nov 1, 2021 · Structural changes were observed in the as-deposited films at room temperature, suggesting an orderly structure within an amorphous silicon ...