Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
In this chapter, we deal with model equations and constitutive relations relevant to: simulation of mechanical (e.g., pressure) microsensors; computation of ...
Schellin, Mechanical behaviour of micro machined sensor membrane under uniform external pressure affected by in plane stresses using a Ritz method and ...
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
... Mechanical Behaviour of Micromachined Sensor Membranes under Uniform External Pressure Affected by In-plane Stresses Using a Ritz Method and Hermite Polynomials ...
Jan 31, 2005 · This paper reports on a novel method to characterize the mechanical properties, such as the elastic modulus, of circular microfabricated ...
Schellin, Mechanical behaviour of micro machined sensor membrane under uniform external pressure affected by in plane stresses using a Ritz method and ...