Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
Schellin, Mechanical behaviour of micro machined sensor membrane under uniform external pressure affected by in plane stresses using a Ritz method and ...
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
In this chapter, we deal with model equations and constitutive relations relevant to: simulation of mechanical (e.g., pressure) microsensors; computation of ...
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials ...
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
Jul 18, 2018 · ... micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
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... Mechanical Behaviour of Micromachined Sensor Membranes under Uniform External Pressure Affected by In-plane Stresses Using a Ritz Method and Hermite Polynomials ...
Jan 31, 2005 · This paper reports on a novel method to characterize the mechanical properties, such as the elastic modulus, of circular microfabricated ...